New PDF release: Soft X-Rays and Extreme Ultraviolet Radiation: Principles

By David Attwood

ISBN-10: 052102997X

ISBN-13: 9780521029971

ISBN-10: 0521652146

ISBN-13: 9780521652148

This precise, complete e-book describes the basic houses of sentimental X-rays and severe ultraviolet (EUV) radiation and discusses their purposes in a large choice of fields, together with EUV lithography for semiconductor chip manufacture and delicate X-ray biomicroscopy. the writer starts by means of offering the proper easy ideas reminiscent of radiation and scattering, wave propagation, diffraction, and coherence. He then is going directly to study a wide variety of phenomena and functions. the themes coated contain spectromicroscopy, EUV astronomy, synchrotron radiation, and smooth X-ray lasers. the writer additionally offers a wealth of priceless reference fabric resembling electron binding energies, attribute emission traces and photo-absorption cross-sections. The ebook should be of serious curiosity to graduate scholars and researchers in engineering, physics, chemistry, and the lifestyles sciences. it is going to additionally attract training engineers fascinated with semiconductor fabrication and fabrics science.

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications by David Attwood


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